Industrial equipment

From the evolution
of manufacturing
comes the evolution
of IT society

Canon industrial equipment drives
manufacturing in the IoT age

OLED manufacturing, supported by Canon

OLED panels, used for smartphones and televisions, offer such advantages as high image quality, outstanding black levels and low power consumption. With technological advancements enabling thinner and even bendable OLED panels, the growing demand is expected to continue.
Delivering high productivity and high quality, Canon Tokki’s OLED panel manufacturing equipment has established a dominant market position as an industry leader. In collaboration with Group companies Canon ANELVA and Canon Machinery, Canon Tokki conducts manufacturing, installation and maintenance services while undertaking the development of new equipment that will make possible higher definition and raise productivity.

Transport unit of OLED panel manufacturing equipment

Three Canon Group companies achieving high synergy

Canon Machinery holds a large share of the market for die bonders, which are used for bonding semiconductor die to a substrate. The company is also a leader in factory automation, manufacturing such custom equipment as automated assembly lines for lithium-ion batteries.
Canon ANELVA specializes in vacuum thin-film deposition technology, used in the fabrication of semiconductor and communication devices, and in sputtering equipment, which is essential to the production of hard disk drives (HDD) and LEDs.
Together with Canon Tokki, Canon Machinery and Canon ANELVA are pioneering the development of industrial equipment for manufacturing next-generation semiconductor and electronic devices. The three Group companies closely collaborate on manufacturing technology, procurement and logistics while expanding business through development of new products and services.

Canon ANELVA’s sputtering equipment plays a major role in the manufacturing of semiconductor devices

Nanoimprint lithography, the ultimate microfabrication technology

In the drive toward greater miniaturization of circuit patterns, the semiconductor lithography equipment that uses light to etch patterns onto the silicon wafers has become ever larger and more expensive.
In pursuit of an alternative, Canon developed nanoimprint lithography technology, which entails the simple principle of a mold, or mask, being pressed like a stamp onto a resist on the wafer surface. Today, nanoimprint lithography is gaining recognition as a more compact system that can reduce the cost of semiconductor manufacturing.